Referenzen
Metrologia
46 (
2009)
Tech. Suppl., 04001 [Online only] |
|
Advanced Lithography 2008, San Jose, USA, 22-27, February, 2008
Metrology, inspection, and process control for microlithography XXII; Proceedings of SPIE
Band 6922
(2008)
, Seite 69223J-1 - 69223J-11
DOI: 10.1117/12.768429
Copyright: SPIE, The International Society for Optical Engineering |
|
Final Report
Herausgeber: IOP Science,
2008
The final report has been peer-reviewed and approved for publication by the CCL, according to the provisions of the CIPM Mutual Recognition Arrangement (MRA). |
|
Measurement Science and Technology 18, 667-674 ( 2007) | |
107. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Weingarten, Germany, 06-10, June, 2006
DGaO-Proceedings
Band 107
(2006)
Online only, P46(Poster) |
|
Measurement Science and Technology 16(6), 1241 - 1249 ( 2005) |