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Referenzen
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G. Ehret, B. Bodermann, W. Mirandé
Nanoscale metrology ; in: Measurement Science and Technology 18(2), 430-438 ( 2007)
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G. Ehret, B. Bodermann, W. Mirandé
106. Jahrestagung der Deutschen Gesellschaft für angewandte Optik (DGaO), Breslau, Poland, 17-21, May, 2005
DGaO-Proceedings Band 106 (2005)

Online only, A27

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G. Ehret, B. Bodermann, W. Mirandé
SPIE International Symposium Optical Metrology, Munich, Germany, 13.-17. June 2005
Optical measurement systems for industrial inspection IV; Proceedings of SPIE Band 5856 (2005) , Seite 41-48
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G. Ehret, B. Bodermann, W. Mirandé
105. Jahrestagung der DGaO, Bad Kreuznach, Germany, 01-05, June, 2004
DGaO-Proceedings (2004)

Online only, P2

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B. Bodermann, G. Ehret, W. Mirandé
10th Microoptics Conference, Jena, Germany, 01-03, September, 2004
10th Microoptics Conference: Proceedings (2004)

CD-ROM] file name: Abstract_PDFs\L-40.pdf], 2 S

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B. Bodermann, W. Michaelis, A. Diener, W. Mirandé
GMM-Conference, Sonthofen, Germany, 13-15, January, 2003
EMC 2003 : 19th European Mask Conference on Mask Technology for Integrated Circuits and Micro-Components; GMM-Fachbericht Band 39 (2003) , Seite 47-52
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B. Bodermann, W. Mirandé, N. Kerwien, A. Tavrov, M. Totzeck, H. Tiziani
Int. Symposium on Optical Science and Technology, SPIE's 48th Annual Meeting, San Diego, USA, 3-5, August, 2003
Advanced characterization techniques for optics, semiconductors, and nanotechnologies: 3 - 5 August 2003, San Diego, California, USA; Proceedings of SPIE Band 5188 (2003) , Seite 320-330
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B. Bodermann, W. Michaelis, A. Diener, W. Mirandé
SPIE's 47 Annual Meeting, Seattle, USA, 08-10, July, 2002
Interferometry XI: Techniques and analysis;(Proceedings of SPIE Band 4777 (2002) , Seite 352-361
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B. Bodermann, W. Michaelis, A. Diener, W. Mirandé
5th Seminar on Quantitative Microscopy and 1st Seminar on Nanoscale Calibration Standards and Methods ; Nanoscale 2001, Bergisch Gladbach, Germany, 15.-16. November 2001
Proceedings of the 5th seminar on quantitative microscopy and 1st seminar on nanoscale calibration standards and methods : NanoScale 2001 ; Dimensional measurements in the micro- and nanometre range ; (PTB-Bericht PTB-F-44) (2001)