Logo der Physikalisch-Technischen Bundesanstalt

The sixth seminar in a series launched in 2011 is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.



Datum:Di 19.10.2021 / 08:30
bis:Mi 20.10.2021 / 14:30

PTB - Institut Berlin

Vortragender:multiple talks - see https://www.euv2021.ptb.de/programme/