| Titel: |
Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing |
| Autor(en): |
A. Wiegmann, M. Schulz and C. Elster |
| Journal: |
Optics express |
| Jahr: |
2010 |
| Band: |
18 |
| Ausgabe: |
15 |
| Seite(n): |
15807--19 |
|
Optical Society of America |
| DOI: |
10.1364/OE.18.015807 |
| ISSN: |
1094-4087 |
| Web URL: |
http://www.osapublishing.org/viewmedia.cfm?uri=oe-18-15-15807&seq=0&html=true |
| Schlüsselwörter: |
Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement |
| Marker: |
8.42, Form, SimOpt |
| Zusammenfassung: |
We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly. |
