Publikationen 8.41
Publikations Einzelansicht
Beitrag zu Sammlung
| Titel: | Sensitivity Analysis for Indirect Measurement in Scatterometry and the Reconstruction of Periodic Grating Structures |
|---|---|
| Autor(en): | H. Groß and A. Rathsfeld |
| Jahr: | 2006 |
| Buchtitel: | WIAS Preprint No. 1164 |
| Schlüsselwörter: | 8.41,Scatter-Inv |
| Marker: | 8.41,Scatter-Inv |