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The sixth seminar in a series launched in 2011 is a forum for interdisciplinary exchange between basic and technology-oriented researchers and industrial users. The topics cover the latest results from industrial applications of EUV radiation for lithography and measurement technology to developments for space-based VUV and EUV spectroscopy and the investigation of nanostructured surfaces.



Date:Tue 19.10.2021 / 08:30
to:Wed 20.10.2021 / 14:30

PTB - Institut Berlin

Speaker:multiple talks - see https://www.euv2021.ptb.de/programme/