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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Charakterisierung von Nanostrukturen aund Substraten der Halbleiterindustrie
Author(s): B. Bodermann, J. Flügge and H. Groß
Year: 2011
Book title: PTB-Mitteilungen 2/2011 "Themenschwerpunkt Nanometrologie"
Keywords: 8.41,Nanometrology
Tags: 8.41, Scatter-Inv

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