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Mathematical Modelling and Data Analysis

Department 8.4

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Article

Title: Bayesian approach to determine critical dimensions from scatterometric measurements
Author(s): S. Heidenreich, H. Gross and M. Bär
Journal: Metrologia
Year: 2018
Volume: 55
Issue: 6
Pages: 201
DOI: 10.1088/1681-7575/aae41c
Tags: 8.4,8.41

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