Publication single view
Article
| Title: | Bayesian approach to determine critical dimensions from scatterometric measurements |
|---|---|
| Author(s): | S. Heidenreich, H. Gross and M. Bär |
| Journal: | Metrologia |
| Year: | 2018 |
| Volume: | 55 |
| Issue: | 6 |
| Pages: | 201 |
| DOI: | 10.1088/1681-7575/aae41c |
| Tags: | 8.4,8.43, UQ |