Publication single view
Article
| Title: | Impact of different stochastic line edge roughness patterns on measurements in scatterometry - a simulation study |
|---|---|
| Author(s): | H. Gross, S. Heidenreich and M. Bär |
| Journal: | Measurement |
| Year: | 2017 |
| Volume: | 98 |
| Pages: | 339--346 |
| DOI: | 10.1016/j.measurement.2016.08.027 |
| Tags: | 8.4,8.43,Scatter-Inv |