Publication single view
Article
Title: | Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models |
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Author(s): | S. Heidenreich, H. Gross and M. Bär |
Journal: | International Journal for Uncertainty Quantification |
Year: | 2015 |
Pages: | 511 |
DOI: | 10.1615/Int.J.UncertaintyQuantification.2015013050 |
Tags: | 8.43, Scatter-Inv, UQ |