Title: |
Suppression of aliasing in multi-sensor scanning absolute profile measurement |
Author(s): |
A. Wiegmann, M. Schulz and C. Elster |
Journal: |
Optics Express |
Year: |
2009 |
Volume: |
17 |
Issue: |
13 |
Pages: |
11098 |
|
Optical Society of America |
DOI: |
10.1364/OE.17.011098 |
ISSN: |
1094-4087 |
Web URL: |
http://www.osapublishing.org/viewmedia.cfm?uri=oe-17-13-11098&seq=0&html=true |
Keywords: |
Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement |
Tags: |
8.42, Form, SimOpt |
Abstract: |
The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 μm-1) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 μm. |