Logo of the Physikalisch-Technische Bundesanstalt

Mathematical Modelling and Data Analysis

Department 8.4

Publication single view

Article

Title: A scatterometry inverse problem in optical mask metrology
Author(s): R. Model, A. Rathsfeld, H. Gross, M. Wurm and B. Bodermann
Journal: Journal of Physics: Conference Series
Year: 2008
Volume: 135
Issue: 1
Pages: 012071
IOP Publishing
DOI: 10.1088/1742-6596/135/1/012071
ISSN: 1742-6596
Web URL: http://iopscience.iop.org/article/10.1088/1742-6596/135/1/012071
Keywords: 8.41,Scatter-Inv,Scatterometrie
Tags: 8.41,Scatter-Inv

Back to the list view