Publication single view
Article
Title: | A scatterometry inverse problem in optical mask metrology |
---|---|
Author(s): | R. Model, A. Rathsfeld, H. Gross, M. Wurm and B. Bodermann |
Journal: | Journal of Physics: Conference Series |
Year: | 2008 |
Volume: | 135 |
Issue: | 1 |
Pages: | 012071 |
IOP Publishing | |
DOI: | 10.1088/1742-6596/135/1/012071 |
ISSN: | 1742-6596 |
Web URL: | http://iopscience.iop.org/article/10.1088/1742-6596/135/1/012071 |
Keywords: | 8.41,Scatter-Inv,Scatterometrie |
Tags: | 8.41,Scatter-Inv |