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Mathematical Modelling and Data Analysis

Department 8.4

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Article

Title: Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry
Author(s): M.-A. Henn, S. Heidenreich, H. Groß, A. Rathsfeld, F. Scholze and M. Bär
Journal: Opt. Lett.
Year: 2012
Volume: 37
Issue: 24
Pages: 5229--5231
DOI: 10.1364/OL.37.005229
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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