Publication single view
Contribution to proceeding
| Title: | Improved geometry reconstruction and uncertainty evaluation for extreme ultraviolet (EUV) scatterometry based on maximum likelihood estimation |
|---|---|
| Author(s): | M.-A. Henn, H. Groß, F. Scholze, C. Elster and M. Bär |
| Year: | 2011 |
| Book title: | SPIE Proc. 80830N |
| Keywords: | 8.41,Scatter-Inv |
| Tags: | 8.41,Scatter-Inv |