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Article
| Title: | A surrogate model enables a Bayesian approach to the inverse problem of scatterometry |
|---|---|
| Author(s): | S. Heidenreich, H. Gross, M.-A. Henn, C. Elster and M. Bär |
| Journal: | J. Phys. Conf. Ser. |
| Year: | 2014 |
| Volume: | 490 |
| Issue: | 1 |
| Pages: | 012007 |
| IOP Publishing | |
| DOI: | 10.1088/1742-6596/490/1/012007 |
| ISSN: | 1742-6596 |
| Web URL: | http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007 |
| Tags: | 8.43,Bayes,Scatter-Inv,Regression,8.42, UQ |