Publication single view
Article
Title: | Profile reconstruction in extreme ultraviolet (EUV) scatterometry: modeling and uncertainty estimates |
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Author(s): | H. Gross, A. Rathsfeld, F. Scholze and M. Bär |
Journal: | Measurement Science and Technology |
Year: | 2009 |
Volume: | 20 |
Issue: | 10 |
Pages: | 105102 |
IOP Publishing | |
DOI: | 10.1088/0957-0233/20/10/105102 |
ISSN: | 0957-0233 |
Web URL: | http://iopscience.iop.org/article/10.1088/0957-0233/20/10/105102 |
Keywords: | 8.41,Scatter-EUV,Scatter-Inv,Scatterometrie |
Tags: | 8.41,Scatter-Inv |