Publication single view
Article
Title: | Mathematical modelling of indirect measurements in scatterometry |
---|---|
Author(s): | H. Groß, R. Model, M. Bär, M. Wurm, B. Bodermann and A. Rathsfeld |
Journal: | Measurement |
Year: | 2006 |
Volume: | 39 |
Issue: | 9 |
Pages: | 782--794 |
DOI: | 10.1016/j.measurement.2006.04.009 |
ISSN: | 02632241 |
Web URL: | http://www.researchgate.net/publication/223944217\_Mathematical\_modelling\_of\_indirect\_measurements\_in\_scatterometry |
Keywords: | 8.41 |
Tags: | 8.41, Scatter-Inv |