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Contribution to book
| Title: | Stochastic modeling aspects for an improved solution of the inverse problem in scatterometry |
|---|---|
| Author(s): | H. Groß, M.-A. Henn, A. Rathsfeld and M. Bär |
| Editor: | F. Pavese, M. Bär, J.-R. Filtz, A. B. Forbes, L. Pendrill, K. Shirono |
| Year: | 2012 |
| Book title: | Advanced Mathematical & Computational Tools in Metrology and Testing IX |
| World Scientific New Jersey | |
| Keywords: | 8.41,Scatter-Inv |
| Tags: | 8.41,Scatter-Inv |