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Mathematical Modelling and Data Analysis

Department 8.4

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Article

Title: Modeling aspects to improve the solution of the inverse problem in scatterometry
Author(s): H. Groß, S. Heidenreich, M.-A. Henn, M. Bär and A. Rathsfeld
Journal: Cont. Dyn. S. - S
Year: 2015
Volume: 8
Pages: 497-519
DOI: 10.3934/dcdss.2015.8.497
Tags: 8.41,Scatter-Inv

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