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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Challenges in nanometrology: high precision measurement of position and size
Author(s): H. Bosse, B. Bodermann, G. Dai, J. Flügge, C. G. Frase, H. Gross, W. Häßler-Grohne, P. Köchert, R. Könning, F. Scholze and C. Weichert
Journal: Technisches Messen
Year: 2015
Volume: 82
Pages: 346-358
File URL: 10.1515/teme-2015-0002
Tags: 8.41, Scatter-Inv

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