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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Bayesian approach to the statistical inverse problem of scatterometry: Comparison of three surrogate models
Author(s): S. Heidenreich, H. Gross and M. Bär
Journal: International Journal for Uncertainty Quantification
Year: 2015
Pages: 511
DOI: 10.1615/Int.J.UncertaintyQuantification.2015013050
Tags: 8.43, Scatter-Inv, UQ

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