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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Improving the lateral resolution of a multi-sensor profile measurement method by non-equidistant sensor spacing
Author(s): A. Wiegmann, M. Schulz and C. Elster
Journal: Optics express
Year: 2010
Volume: 18
Issue: 15
Pages: 15807--19
Optical Society of America
DOI: 10.1364/OE.18.015807
ISSN: 1094-4087
Web URL: http://www.osapublishing.org/viewmedia.cfm?uri=oe-18-15-15807&seq=0&html=true
Keywords: Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement
Tags: 8.42, Form, SimOpt
Abstract: We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly.

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