Logo of the Physikalisch-Technische Bundesanstalt

Mathematical Modelling and Data Analysis

Department 8.4

Publication single view


Title: Optical flatness metrology: 40 years of progress
Author(s): M. Schulz, A. Wiegmann, A. Marquez and C. Elster
Journal: Opt. Pura Apl
Year: 2008
Book title: Opt. Pura Apl
Volume: 41
Pages: 325
DOI: 10.2971/jeos.2010.10011
File URL: http://www.sedoptica.es/Menu_Volumenes/pdfs/314.pdf
Keywords: Deflectometry, Interferometry, Mathematical methods, Metrology, Optical inspection
Tags: 8.42, SimOpt, Form
Abstract: Optical flatness metrology has improved significantly in the last decades due to novel measurement tools and new math-based methods. An overview is given summarizing the most important optical techniques for flatness metrology at the nanometer level. The capabilities of modern methods such as the interferometric three-flat test accompanied by a computer-aided evaluation, the Traceable Multi Sensor method as an improved stitching method, and difference deflectometry represented by the Extended Shear Angle Difference method are reviewed.
Note: Open Access

Back to the list view