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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Concept, design and capability analysis of the new Deflectometric Flatness Reference at PTB
Author(s): M. Schulz, G. Ehret, M. Stavridis and C. Elster
Journal: Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
Year: 2010
Volume: 616
Issue: 2-3
Pages: 134--139
DOI: 10.1016/j.nima.2009.10.108
ISSN: 01689002
Web URL: http://www.sciencedirect.com/science/article/pii/S0168900209020592
Keywords: ESAD,Flatness measurement,Nanometrology,Simulation
Tags: 8.42,Deflectometry,Form,SimOpt
Abstract: At PTB, a new setup for the highly accurate topography measurement of nearly flat optical surfaces is now under construction. The so-called Deflectometric Flatness Reference (DFR) is designed to measure in the direct deflectometric mode by applying an autocollimator and a scanning pentaprism, and in the difference deflectometric mode corresponding to the Extended Shear Angle Difference (ESAD) principle invented by PTB. With the new DFR instrument, horizontally as well as vertically orientated specimens with dimensions of up to 1m and a mass of up to 120kg will be measurable. The design of the new instrument is supported by employing a comprehensive simulation environment developed for dimensional measuring machines. The mechanical and optical concept is illustrated together with the current design of the DFR setup. Results from the simulations are presented to derive requirements for tolerated mechanical stage deviations and alignment accuracies.

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