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Mathematical Modelling and Data Analysis

Department 8.4

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Article

Title: Virtual experiments for the assessment of data analysis and uncertainty quantification methods in scatterometry
Author(s): G. Kok, v. M. Dijk, G. Wübbeler and C. Elster
Journal: Metrologia
Year: 2023
State: accepted
DOI: 10.1088/1681-7575/acd6fd
Tags: 8.4,8.42,Messunsicherheit,Form

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