Logo of the Physikalisch-Technische Bundesanstalt

Mathematical Modelling and Data Analysis

Department 8.4

Publication single view


Title: Sensitivity analysis for the detection of pitchwalk in self- aligned quadruple patterning by GISAXS
Author(s): M. Casfor Zapata, N. Farchmin, M. Pflüger, K. Nikolaev, V. Soltwisch, S. Heidenreich, C. Laube, M. Kolbe and F. Scholze
Year: 2020
Book title: Proc. of SPIE
Volume: 11325
Conference name: Metrology, Inspection, and Process Control for Microlithography XXXIV
San Jose, USA
Conference date: 20.03.2020
DOI: 10.1117/12.2552037
Tags: 8.4,8.43,UQ

Back to the list view