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Mathematical Modelling and Data Analysis

Department 8.4

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Title: A scatterometry inverse problem in optical mask metrology
Author(s): R. Model, A. Rathsfeld, H. Gross, M. Wurm and B. Bodermann
Journal: Journal of Physics: Conference Series
Year: 2008
Volume: 135
Issue: 1
Pages: 012071
IOP Publishing
DOI: 10.1088/1742-6596/135/1/012071
ISSN: 1742-6596
Web URL: http://iopscience.iop.org/article/10.1088/1742-6596/135/1/012071
Keywords: 8.41,Scatter-Inv,Scatterometrie
Tags: 8.41,Scatter-Inv

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