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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors
Author(s): M.-A. Henn, H. Gross, S. Heidenreich, F. Scholze, C. Elster and M. Bär
Journal: Measurement Science and Technology
Year: 2014
Volume: 25
Issue: 4
Pages: 044003
IOP Publishing
DOI: 10.1088/0957-0233/25/4/044003
ISSN: 0957-0233
Web URL: http://iopscience.iop.org/article/10.1088/0957-0233/25/4/044003
Tags: 8.43,Scatter-Inv,Scatterometrie, 8.42

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