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Mathematical Modelling and Data Analysis

Department 8.4

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Title: A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Author(s): S. Heidenreich, H. Gross, M.-A. Henn, C. Elster and M. Bär
Journal: J. Phys. Conf. Ser.
Year: 2014
Volume: 490
Issue: 1
Pages: 012007
IOP Publishing
DOI: 10.1088/1742-6596/490/1/012007
ISSN: 1742-6596
Web URL: http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007
Tags: 8.43,Bayes,Scatter-Inv,Regression,8.42, UQ

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