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Mathematical Modelling and Data Analysis

Department 8.4

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Title: Mathematical modelling of indirect measurements in scatterometry
Author(s): H. Groß, R. Model, M. Bär, M. Wurm, B. Bodermann and A. Rathsfeld
Journal: Measurement
Year: 2006
Volume: 39
Issue: 9
Pages: 782--794
DOI: 10.1016/j.measurement.2006.04.009
ISSN: 02632241
Web URL: http://www.researchgate.net/publication/223944217\_Mathematical\_modelling\_of\_indirect\_measurements\_in\_scatterometry
Keywords: 8.41
Tags: 8.41, Scatter-Inv

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