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Mathematical Modelling and Data Analysis

Department 8.4

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Contribution to book

Title: Stochastic modeling aspects for an improved solution of the inverse problem in scatterometry
Author(s): H. Groß, M.-A. Henn, A. Rathsfeld and M. Bär
Editor: F. Pavese, M. Bär, J.-R. Filtz, A. B. Forbes, L. Pendrill, K. Shirono
Year: 2012
Book title: Advanced Mathematical & Computational Tools in Metrology and Testing IX
World Scientific New Jersey
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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