This file was created by the TYPO3 extension bib --- Timezone: CEST Creation date: 2023-03-31 Creation time: 15-27-21 --- Number of references 39 phdthesis HarrenneeHoffmann2022 2022 8 15 publiziert 8.4,8.42,ML,Form https://depositonce.tu-berlin.de/bitstream/11303/17264/4/harren_lara.pdf TU Berlin PhD Thesis 10.14279/depositonce-16044 LHarren née Hoffmann article KokWE2022 Metrology 2022 6 12 2 311--319 8.4,8.42,Messunsicherheit,Form 10.3390/metrology2020019 GKok GWübbeler CElster article WubbelerMKHHE2022 Metrology 2022 3 1 2 1 114--127 8.42,8.4,Form 10.3390/metrology2010008 GWübbeler MMarschall KKniel DHeißelmann FHärtig CElster article ScholzFMSSE2022 Metrology 2022 2 17 2 84--97 8.4,8.42,Form doi.org/10.3390/metrology2010006 GScholz IFortmeier MMarschall MStavridis MSchulz CElster article FortmeierS2022 Measurement Science and Technology 2022 1 24 33 4 8.4,8.42,Form accepted 10.1088/1361-6501/ac47bd IFortmeier MStavridis MSchulz CElster article HoffmannFE2021_2 tm - Technisches Messen 2021 11 20 publiziert 8.4,8.42,Form,ML 10.1515/teme-2021-0103 LHoffmann IFortmeier CElster article FischedickSBE2020 Metrologia 2021 10 12 58 6 064001 8.4,8.42,Form 10.1088/1681-7575/ac2724 MarkusFischedick ManuelStavridis GuidoBartl ClemensElster article HoffmannFE2021 Machine Learning: Science and Technology 2021 5 24 publiziert 8.4,8.42,ML,Form 10.1088/2632-2153/ac0495 LHoffmann IFortmeier CElster article HoffmannE2020 Journal of Sensors and Sensor Systems 2020 9 24 9 301--307 publiziert 8.4,8.42,ML,Form 10.5194/jsss-9-301-2020 LHoffmann CElster article SchenkerSST2020 Opt. Eng. 2020 3 3 59 3 034101 8.4,8.42,Form 10.1117/1.OE.59.3.034101 MSchenker MStavridis MSchulz RTutsch article FortmeierSLMSHBBKSE2019 Journal of the European Optical Society-Rapid Publications 2020 1 8 16 2 8.4,8.42,Form 10.1186/s41476-019-0124-1 InesFortmeier ReykoSchachtschneider VitLedl OndrejMatousek JensSiepmann AntoniaHarsch RolfBeisswanger YouichiBitou YohanKondo MichaelSchulz ClemensElster article SchachtschneiderSFSE2019 Journal of Sensors and Sensor Systems 2019 2 27 8 1 105--110 8.4, 8.42, Form 10.5194/jsss-8-105-2019 RSchachtschneider MStavridis IFortmeier MSchulz CElster article SchachtschneiderFSABBBBKKLLMPRSSWWSE2018 Measurement Science and Technology 2018 4 9 29 5 055010 8.4, 8.42, KC, Form 10.1088/1361-6501/aaae96 RSchachtschneider IFortmeier MStavridis JAsfour GBerger R BBergmann ABeutler TBlümel HKlawitter KKubo JLiebl FLöffler RMeeß CPruss DRamm MSandner GSchneider MWendel IWiddershoven MSchulz CElster phdthesis Fortmeier2016 Institut für Technische Optik, Universität Stuttgart 2016 7 31 Berichte aus dem Institut für Technische Optik 82 8.42,Form 8.42,Form

Stuttgart

Institut für Technische Optik, Universität Stuttgart Berichte aus dem Institut für Technische Optik 10.18419/opus-8878 IFortmeier article Fortmeier:16 Opt. Express 2016 1 8 24 4 3393--3404 Tilted-wave interferometry is a promising measurement technique for the highly accurate measurement of aspheres and freeform surfaces. However, the interferometric fringe evaluation of the sub-apertures causes unknown patch offsets, which currently prevent this measurement technique from providing absolute measurements. Simple strategies, such as constructing differences of optical path length differences (OPDs) or ignoring the piston parameter, can diminish the accuracy resulting from the absolute form measurement. Additional information is needed instead; in this paper, the required accuracy of such information is explored in virtual experiments. Our simulation study reveals that, when one absolute OPD is known within a range of 500 nm, the accuracy of the final measurement result is significantly enhanced. Interferometry; Metrology; Surface measurements, figure; Aspherics 8.42,Form,EMRP-Form http://www.opticsexpress.org/abstract.cfm?URI=oe-24-4-3393 OSA 10.1364/OE.24.003393 IFortmeier MStavridis AWiegmann MSchulz WOsten CElster article Fortmeier2014 Optics express 2014 22 18 21313--25 Tilted-wave interferometry (TWI) is a novel optical measurement principle for the measurement of aspherical surfaces. For the reconstruction of the wavefront and the surface under test, respectively, perturbation methods are applied, which require the calculation of the Jacobian matrix. For the practical use of the instrument, a fast and exact calculation of the Jacobian matrices is crucial, since this strongly influences the calculation times of the TWI. By applying appropriate approaches in optical perturbation methods we are able to calculate the required Jacobian matrices analytically when the nominal optical path through the system is given. As a result, calculation times for the TWI can be considerably reduced. We finally illustrate the improved TWI procedure and apply methods of optimal design to determine optimal positions of the surface under test. For such applications the fast calculation of the Jacobian matrices is essential. Aspherics,Interferometry,Mathematical methods (general),Metrology,Surface measurements,TWI,figure,tilted-wave 8.42,EMRP_Form,Form,SimOpt http://www.osapublishing.org/viewmedia.cfm?uri=oe-22-18-21313<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 1094-4087 10.1364/OE.22.021313 IFortmeier MStavridis AWiegmann MSchulz WOsten CElster article Schmahling2014 Applied optics 2014 53 7 1481--7 Near-field goniometric measurements are employed to determine the photometric characteristics of light sources, i.e., the spatial and angular distribution of the emitted light. To this end, a complex measurement system consisting of a goniometer and a CCD-based imaging photometer is employed. In order to gain insight into the measurement system and to enable characterization of the whole measurement setup, we propose to apply a computer model to conduct virtual experiments. Within the computer model, the current state of all parts of the virtual experiment can be easily controlled. The reliability of the computer model is demonstrated by a comparison to actual measurement results. As an example for the application of the virtual experiment, we present an analysis of the impact of axial malpositions of the goniometer and camera. Gonio,Light-emitting diodes,Mathematical methods (general),Metrological instrumentation,Metrology,Photometry,virtual experiment 8.4,8.42,Form http://www.osapublishing.org/viewmedia.cfm?uri=ao-53-7-1481<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 1539-4522 10.1364/AO.53.001481 FSchmähling GWübbeler MLopez FGassmann UKrüger FSchmidt ASperling CElster article Ehret2013 Journal of Physics: Conference Series 2013 425 15 152016 8.42, Form, SimOpt http://iopscience.iop.org/article/10.1088/1742-6596/425/15/152016 IOP Publishing en 1742-6588 10.1088/1742-6596/425/15/152016 GEhret MSchulz MBaier AFitzenreiter article Wiegmann2011 tm - Technisches Messen 2011 78 4 184--189 8.42,Form,SimOpt http://www.degruyter.com/view/j/teme.2011.78.issue-4/teme.2011.0102/teme.2011.0102.xml 0171-8096 10.1524/teme.2011.0102 AWiegmann MSchulz CElster article Wiegmann2011a Precision Engineering 2011 35 2 183--190 We present a virtual experiment for the accuracy assessment of the sub-aperture interferometric measurement of a synchrotron mirror involving several thousand sub-aperture topographies. The virtual experiment simulates the measurement process and accounts for the influence of positioning device errors, interferometer errors, non-perfect calibration of machine geometry as well as errors in the interferometer reference. Two principles are considered for reconstructing the form of a test specimen from the conducted sub-aperture topographies, a stitching procedure and a direct measurement method. The virtual experiments are applied to the task of absolute form measurement (including its radius of curvature) of a synchrotron mirror with a length of 30cm, a width of 4cm, a maximum curvature of about 44mm−1 and a peak-to-valley of 5mm. As a result, reconstruction accuracies can be expected to be in the range of 100nm when the stitching method is applied, which outperforms the direct measurement method by a factor of about 3. Interferometry,Simulation,Stitching,Virtual experiment,virtual experiment 8.42,Form,SimOpt http://www.sciencedirect.com/science/article/pii/S014163591000125X 01416359 10.1016/j.precisioneng.2010.08.007 AWiegmann MStavridis MWalzel FSiewert TZeschke MSchulz CElster article Schulz2010 Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 2010 616 2-3 134--139 At PTB, a new setup for the highly accurate topography measurement of nearly flat optical surfaces is now under construction. The so-called Deflectometric Flatness Reference (DFR) is designed to measure in the direct deflectometric mode by applying an autocollimator and a scanning pentaprism, and in the difference deflectometric mode corresponding to the Extended Shear Angle Difference (ESAD) principle invented by PTB. With the new DFR instrument, horizontally as well as vertically orientated specimens with dimensions of up to 1m and a mass of up to 120kg will be measurable. The design of the new instrument is supported by employing a comprehensive simulation environment developed for dimensional measuring machines. The mechanical and optical concept is illustrated together with the current design of the DFR setup. Results from the simulations are presented to derive requirements for tolerated mechanical stage deviations and alignment accuracies. ESAD,Flatness measurement,Nanometrology,Simulation 8.42,Deflectometry,Form,SimOpt http://www.sciencedirect.com/science/article/pii/S0168900209020592 01689002 10.1016/j.nima.2009.10.108 MSchulz GEhret MStavridis CElster article Wiegmann2010 Optics express 2010 18 15 15807--19 We present a method to enhance the achievable lateral resolution of a multi-sensor scanning profile measurement method. The relationship between the profile measurement method considered and established shearing techniques is illustrated. Simulation and measurement results show that non-equidistant sensor spacing can improve the lateral resolution significantly. Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement 8.42, Form, SimOpt http://www.osapublishing.org/viewmedia.cfm?uri=oe-18-15-15807<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 1094-4087 10.1364/OE.18.015807 AWiegmann MSchulz CElster phdthesis Wiegmann2009a 2009 8.42,Form, SimOpt http://dx.doi.org/10.14279/depositonce-2278 TU Berlin PhD Thesis AWiegmann article Wiegmann2009 Optics Express 2009 17 13 11098 The task of anti-aliasing in absolute profile measurement by multi-sensor scanning techniques is considered. Simulation results are presented which demonstrate that aliasing can be highly reduced by a suitable choice of the scanning steps. The simulation results were confirmed by results obtained for interferometric measurements (Nyquist frequency 1/646 &mu;m-1) on a specifically designed chirp specimen with sinusoidal waves of amplitude 100 nm and wavelengths from 2.5 mm down to 19 &mu;m. Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement 8.42, Form, SimOpt http://www.osapublishing.org/viewmedia.cfm?uri=oe-17-13-11098<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 1094-4087 10.1364/OE.17.011098 AWiegmann MSchulz CElster inproceedings Schulz2009b 2008 8.42, Form, SimOpt http://www.dgao-proceedings.de/download/109/109_a6.pdf DGaO Proceedings DGaO 2008 MSchulz AMarquez AWiegmann CElster inproceedings Wiegmann2008b 2008 8.42, Form, SimOpt http://www.dgao-proceedings.de/download/109/109_p28.pdf DGaO Proceedings DGaO 2008 AWiegmann CElster MSchulz MStavridis article Schulz2008 Opt. Pura Apl 2008 41 325 Optical flatness metrology has improved significantly in the last decades due to novel measurement tools and new math-based methods. An overview is given summarizing the most important optical techniques for flatness metrology at the nanometer level. The capabilities of modern methods such as the interferometric three-flat test accompanied by a computer-aided evaluation, the Traceable Multi Sensor method as an improved stitching method, and difference deflectometry represented by the Extended Shear Angle Difference method are reviewed. Open Access Deflectometry, Interferometry, Mathematical methods, Metrology, Optical inspection 8.42, SimOpt, Form http://www.sedoptica.es/Menu_Volumenes/pdfs/314.pdf Opt. Pura Apl 10.2971/jeos.2010.10011 MSchulz AWiegmann AMarquez CElster article Wiegmann2008 Optics Express 2008 16 16 11975 We present a novel procedure for absolute, highly-accurate profile measurement with high dynamic range for large, moderately flat optical surfaces. The profile is reconstructed from many sub-profiles measured by a small interferometer which is scanned along the specimen under test. Additional angular and lateral distance measurements are used to account for the tilt of the interferometer and its precise lateral location during the measurements. Accurate positioning of the interferometer is not required. The algorithm proposed for the analysis of the data allows systematic errors of the interferometer and height offsets of the scanning stage to be eliminated and it does not reduce the resolution. By utilizing a realistic simulation scenario we show that accuracies in the nanometer range can be reached. Image recognition,Instrumentation,Interferometry,Metrology,Surface measurements,algorithms and filters,and metrology,figure,measurement 8.42, Form, SimOpt http://www.osapublishing.org/viewmedia.cfm?uri=oe-16-16-11975<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 1094-4087 10.1364/OE.16.011975 AWiegmann MSchulz CElster inproceedings Schulz2007 2007 8.42, Form, SimOpt http://www.dgao-proceedings.de/download/108/108_a4.pdf DGaO Proceedings DGaO 2007 MSchulz AWiegmann CElster inproceedings Wiegmann2007 2007 8.42, Form, SimOpt http://www.dgao-proceedings.de/download/108/108_p34.pdf DGaO Proceedings DGaO 2007 AWiegmann CElster R DGeckeler MSchulz article Elster2006 Precision Engineering 2006 30 1 32--38 Scanning topography measurements using systems of coupled distance sensors suffer from the presence of scanning stage and systematic sensor errors. While scanning stage errors can be estimated for suitably-designed sensor systems, it is usually not possible to simultaneously estimate both scanning stage and systematic sensor errors. Additional angular scanning stage measurements can solve this problem, and potentials and limitations of such a proceeding will be assessed. It is shown that perfect topography reconstruction can be achieved in the presence of systematic sensor and certain scanning stage errors provided that the measurements are noise-free and no further systematic errors emerge. In general, the topography is reconstructed by the application of least-squares, and the uncertainty associated with the reconstructed topography is derived. Resulting topography accuracies are evaluated for different noise levels of the distance sensor and angular scanning stage measurements, and practical considerations are discussed. The gain in accuracy due to accounting for scanning stage and systematic sensor errors can be large, and high accuracies can be reached. Angular measurement,Distance sensor,High accuracy,High resolution,Least-squares,Topography,Uncertainty 8.42,Form,SimOpt http://www.sciencedirect.com/science/article/pii/S0141635905000504 01416359 10.1016/j.precisioneng.2005.04.001 CElster IWeingärtner MSchulz article Schulz2006 Optical Engineering 2006 45 6 8.42,Form,SimOpt 10.1117/1.2208568 MSchulz CElster article Weingärtner2004 Precision Engineering 2004 28 2 164 - 170 A novel sensor system consisting of four distance sensors is proposed for the scanning measurement of topography. The system achieves high accuracy and allows high lateral resolution. The configuration of the system can be chosen such that it guarantees perfect reconstruction of the topography in the presence of offset and pitch errors of the scan system provided the sensor measurements are error-free. Moreover, a favorable propagation of the random and systematic errors of the sensor measurements is achieved. The error influences are investigated and the sensor system is compared to a previously proposed three-sensor system by analyzing simulated data. High lateral resolution 8.42,Form http://www.sciencedirect.com/science/article/pii/S0141635903001235 0141-6359 10.1016/j.precisioneng.2003.10.001 IWeingärtner CElster article Elster2002 Optik - International Journal for Light and Electron Optics 2002 113 4 154 - 158 Summary Recently, the measurement of curvature has been suggested as a promising new technique for the highly accurate determination of large-area surface profiles on the nanometer scale. It was shown that the curvature can be measured with highest accuracy and high lateral resolution. However, the reconstruction of surface profiles from curvature data involves the numerical solution of an ordinary differential equation for which initial or boundary values must be specified. This paper investigates the accuracy with which surface profiles can be reconstructed from curvature data. The stability of the reconstructions is examined with respect to the presence of measurement noise and the accuracy of the initial values. The assessment of the reconstruction accuracy is based on an analytical solution (up to numerical integration) derived for the case when the measurement results are given in Cartesian coordinates, and on numerical results in the polar case. The results presented for the latter case allow, in particular, conclusions to be drawn regarding the minimum accuracy of data and initial values required for reconstructing aspheres from curvature measurements with nanometer accuracy. Runge-Kutta method 8.42, Form http://www.sciencedirect.com/science/article/pii/S0030402604701345 0030-4026 10.1078/0030-4026-00138 CElster JGerhardt PThomsen-Schmidt MSchulz IWeingärtner inbook Elster2000c 2000 Advanced Mathematical & Computational Tools in Metrology and Testing IV 76-87 8.42,Form P. Ciarlini, A.B. Forbes, F. Pavese, D. Richter World Scientific Singapore Series on Advances in Mathematics for Applied Sciences 53 5 CElster article Elster2000 Appl. Opt. 2000 39 29 5353--5359 A method is proposed for exact discrete reconstruction of atwo-dimensional wave front from four suitably designed lateral shearingexperiments. The method reconstructs any wave front at evaluationpoints of a circular aperture exactly up to an arbitrary constant fornoiseless data, and it shows excellent stability properties in the caseof noisy data. Application of large shears is allowed, and highresolution of the reconstructed wave front can be achieved. Resultsof numerical experiments are presented that demonstrate the capabilityof the method. Interferometry; Optical inspection; Phase measurement 8.42,Form http://ao.osa.org/abstract.cfm?URI=ao-39-29-5353 OSA 10.1364/AO.39.005353 CElster article Elster1999 Journal of Computational and Applied Mathematics 1999 110 1 177--180 Results of lateral shearing interferograms are difference measurements of a wavefront under study, from which this wavefront is to be reconstructed. Properties of the difference operator associated with a shearing experiment are discussed. It is shown that the Moore–Penrose generalized inverse is bounded and it is given in an explicit form for suitably chosen shearing parameters. Difference operator,Generalized inverse,Shearing interferometry 8.42,Form http://www.sciencedirect.com/science/article/pii/S0377042799002320 03770427 10.1016/S0377-0427(99)00232-0 CElster article Elster1999a Applied Optics 1999 38 23 5024 Lateral shearing interferometry is a promising reference-free measurement technique for optical wave-front reconstruction. The wave front under study is coherently superposed by a laterally sheared copy of itself, and from the interferogram difference measurements of the wave front are obtained. From these difference measurements the wave front is then reconstructed. Recently, several new and efficient algorithms for evaluating lateral shearing interferograms have been suggested. So far, however, all evaluation methods are somewhat restricted, e.g., assume a priori knowledge of the wave front under study, or assume small shears, and so on. Here a new, to our knowledge, approach for the evaluation of lateral shearing interferograms is presented, which is based on an extension of the difference measurements. This so-called natural extension allows for reconstruction of that part of the underlying wave front whose information is contained in the given difference measurements. The method is not restricted to small shears and allows for high lateral resolution to be achieved. Since the method uses discrete Fourier analysis, the reconstructions can be efficiently calculated. Furthermore, it is shown that, by application of the method to the analysis of two shearing interferograms with suitably chosen shears, exact reconstruction of the underlying wave front at all evaluation points is obtained up to an arbitrary constant. The influence of noise on the results obtained by this reconstruction procedure is investigated in detail, and its stability is shown. Finally, applications to simulated measurements are presented. The results demonstrate high-quality reconstructions for single shearing interferograms and exact reconstructions for two shearing interferograms. Interferometry,Optical inspection,Phase measurement 8.42,Form http://www.osapublishing.org/viewmedia.cfm?uri=ao-38-23-5024<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America EN 0003-6935 10.1364/AO.38.005024 CElster IWeingärtner article Elster1999b Journal of the Optical Society of America A 1999 16 9 2281 A new method is presented for the reconstruction of a one-dimensional wave front on the basis of difference measurements from two shearing interferograms. The proposed algorithm reconstructs any wave front exactly up to an arbitrary constant. The method is not restricted to small shears. However, the shearing parameters have to be chosen such that certain constraints are satisfied. A procedure for determining such shearing parameters is given. In addition, it is shown that the procedure is stable with respect to noise introduced into the differences. Interferometry,Optical inspection,Paraxial wave optics,Phase measurement 8.42,Form http://www.osapublishing.org/viewmedia.cfm?uri=josaa-16-9-2281<prt>&amp;</prt>seq=0<prt>&amp;</prt>html=true Optical Society of America 1084-7529 10.1364/JOSAA.16.002281 CElster IWeingärtner