Publication single view
Article
Title: | Development of a metrological reference system for the form measurement of aspheres and freeform surfaces based on a tilted-wave interferometer |
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Author(s): | I. Fortmeier, M. Stavridis, M. Schulz and C. Elster |
Journal: | Measurement Science and Technology |
Year: | 2022 |
Volume: | 33 |
Issue: | 4 |
State: | accepted |
DOI: | 10.1088/1361-6501/ac47bd |
Tags: | 8.4,8.42,Form |