Publications 8.41
Publication single view
Article
| Title: | Measurements of CD and sidewall profile of EUV photomask structures using CD-AFM and tilting-AFM |
|---|---|
| Author(s): | G. Dai, K. Hahm, F. Scholze, M.-A. Henn, H. Groß, J. Fluegge and H. Bosse |
| Journal: | Meas. Sci. Tech. |
| Year: | 2014 |
| Volume: | 25 |
| Issue: | 4 |
| Pages: | 044002 |
| IOP Publishing | |
| DOI: | 10.1088/0957-0233/25/4/044002 |
| ISSN: | 0957-0233 |
| Web URL: | http://iopscience.iop.org/article/10.1088/0957-0233/25/4/044002 |
| Keywords: | Scatterometrie |
| Tags: | 8.41,Scatter-EUV |