Publications 8.41
Publication single view
Contribution to proceeding
| Title: | First steps towards a scatterometry reference standard |
|---|---|
| Author(s): | B. Bodermann, P.-E. Hansen, S. Burger, M.-A. Henn, H. Gross, F. Scholze, J. Endres and M. Wurm |
| Year: | 2012 |
| Book title: | SPIE Proc. |
| Keywords: | 8.43,Scatter-Inv |
| Tags: | 8.43,Scatter-Inv |