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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Contribution to proceeding

Title: First steps towards a scatterometry reference standard
Author(s): B. Bodermann, P.-E. Hansen, S. Burger, M.-A. Henn, H. Gross, F. Scholze, J. Endres and M. Wurm
Year: 2012
Book title: SPIE Proc.
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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