Publications 8.41
Publication single view
Article
Title: | Bayesian approach to determine critical dimensions from scatterometric measurements |
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Author(s): | S. Heidenreich, H. Gross and M. Bär |
Journal: | Metrologia |
Year: | 2018 |
Volume: | 55 |
Issue: | 6 |
Pages: | 201 |
DOI: | 10.1088/1681-7575/aae41c |
Tags: | 8.4,8.43, UQ |