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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Article

Title: Bayesian approach to determine critical dimensions from scatterometric measurements
Author(s): S. Heidenreich, H. Gross and M. Bär
Journal: Metrologia
Year: 2018
Volume: 55
Issue: 6
Pages: 201
DOI: 10.1088/1681-7575/aae41c
Tags: 8.4,8.41,8.43, UQ

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