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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Title: Impact of different stochastic line edge roughness patterns on measurements in scatterometry - a simulation study
Author(s): H. Gross, S. Heidenreich and M. Bär
Journal: Measurement
Year: 2017
Volume: 98
Pages: 339--346
DOI: 10.1016/j.measurement.2016.08.027
Tags: 8.4,8.41,Scatter-Inv

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