Publications 8.41
Publication single view
Article
| Title: | Challenges in nanometrology: high precision measurement of position and size |
|---|---|
| Author(s): | H. Bosse, B. Bodermann, G. Dai, J. Flügge, C. G. Frase, H. Gross, W. Häßler-Grohne, P. Köchert, R. Könning, F. Scholze and C. Weichert |
| Journal: | Technisches Messen |
| Year: | 2015 |
| Volume: | 82 |
| Pages: | 346-358 |
| File URL: | 10.1515/teme-2015-0002 |
| Tags: | 8.41, Scatter-Inv |