Publications 8.41
Publication single view
Contribution to proceeding
| Title: | On numerical reconstruction of lithographic masks in DUV scatterometry |
|---|---|
| Author(s): | M.-A. Henn, R. Model, M. Bär, M. Wurm, B. Bodermann, A. Rathsfeld and H. Groß |
| Year: | 2009 |
| Book title: | SPIE Proc. 7390 |
| Keywords: | 8.41,Scatter-Inv |
| Tags: | 8.41,Scatter-Inv |