Publications 8.41
Publication single view
Article
Title: | Improved grating reconstruction by determination of line roughness in extreme ultraviolet scatterometry |
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Author(s): | M.-A. Henn, S. Heidenreich, H. Groß, A. Rathsfeld, F. Scholze and M. Bär |
Journal: | Opt. Lett. |
Year: | 2012 |
Volume: | 37 |
Issue: | 24 |
Pages: | 5229--5231 |
DOI: | 10.1364/OL.37.005229 |
Keywords: | 8.43,Scatter-Inv |
Tags: | 8.43,Scatter-Inv |