Publications 8.41
Publication single view
Article
| Title: | Improved reconstruction of critical dimensions in extreme ultraviolet scatterometry by modeling systematic errors |
|---|---|
| Author(s): | M.-A. Henn, H. Gross, S. Heidenreich, F. Scholze, C. Elster and M. Bär |
| Journal: | Measurement Science and Technology |
| Year: | 2014 |
| Volume: | 25 |
| Issue: | 4 |
| Pages: | 044003 |
| IOP Publishing | |
| DOI: | 10.1088/0957-0233/25/4/044003 |
| ISSN: | 0957-0233 |
| Web URL: | http://iopscience.iop.org/article/10.1088/0957-0233/25/4/044003 |
| Tags: | 8.43,Scatter-Inv,Scatterometrie, 8.42 |