Logo of the Physikalisch-Technische Bundesanstalt

Modelling and Simulation

Working Group 8.41

Publications 8.41

Publication single view

Article

Title: A surrogate model enables a Bayesian approach to the inverse problem of scatterometry
Author(s): S. Heidenreich, H. Gross, M.-A. Henn, C. Elster and M. Bär
Journal: J. Phys. Conf. Ser.
Year: 2014
Volume: 490
Issue: 1
Pages: 012007
IOP Publishing
DOI: 10.1088/1742-6596/490/1/012007
ISSN: 1742-6596
Web URL: http://iopscience.iop.org/article/10.1088/1742-6596/490/1/012007
Tags: 8.41,Bayes,Scatter-Inv,Regression,8.42, UQ

Back to the list view