Publications 8.41
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| Title: | Sensitivity Analysis for Indirect Measurement in Scatterometry and the Reconstruction of Periodic Grating Structures |
|---|---|
| Author(s): | H. Groß and A. Rathsfeld |
| Year: | 2006 |
| Book title: | WIAS Preprint No. 1164 |
| Keywords: | 8.41,Scatter-Inv |
| Tags: | 8.41,Scatter-Inv |