Publications 8.41
Publication single view
Article
| Title: | Modeling aspects to improve the solution of the inverse problem in scatterometry |
|---|---|
| Author(s): | H. Groß, S. Heidenreich, M.-A. Henn, M. Bär and A. Rathsfeld |
| Journal: | Cont. Dyn. S. - S |
| Year: | 2015 |
| Volume: | 8 |
| Pages: | 497-519 |
| DOI: | 10.3934/dcdss.2015.8.497 |
| Tags: | 8.43,Scatter-Inv |