Publications 8.41
Publication single view
Article
Title: | Modeling aspects to improve the solution of the inverse problem in scatterometry |
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Author(s): | H. Groß, S. Heidenreich, M.-A. Henn, M. Bär and A. Rathsfeld |
Journal: | Cont. Dyn. S. - S |
Year: | 2015 |
Volume: | 8 |
Pages: | 497-519 |
DOI: | 10.3934/dcdss.2015.8.497 |
Tags: | 8.43,Scatter-Inv |