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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Contribution to proceeding

Title: Computational methods estimating uncertainties for profile reconstruction in scatterometry
Author(s): H. Gross, A. Rathsfeld, F. Scholze, R. Model and M. Bär
Year: 2008
Pages: 6995OT-1 – 6995OT-9
Proc. SPIE6995
Tags: 8.41, Scatter-Inv

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