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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Contribution to proceeding

Title: Numerical analysis of DUV scatterometry on EUV masks
Author(s): M. Wurm, B. Bodermann, R. Model and H. Groß
Year: 2007
Book title: SPIE Proc. 6617
Keywords: 8.41,Scatter-Inv
Tags: 8.41,Scatter-Inv

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