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Modelling and Simulation

Working Group 8.41

Publications 8.41

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Title: A standard to test the dynamics of vacuum gauges in the millisecond range
Author(s): K. Jousten, S. Pantazis, J. Buthig, R. Model, M. Wüest and J. Iwicki
Journal: Vacuum
Year: 2013
Volume: 100
Pages: 14--17
DOI: 10.1016/j.vacuum.2013.07.037
ISSN: 0042207X
File URL: fileadmin/internet/fachabteilungen/abteilung_8/8.4_mathematische_modellierung/8.42/DYNAMIK/842_dynamik_Sensors_2010_10_7621.pdf
Web URL: http://www.sciencedirect.com/science/article/pii/S0042207X13002546
Keywords: Choked flow,Dynamic pressure,Response time,Vacuum gauge,Vacuum metrology
Tags: 8.41,Flow
Abstract: Vacuum gauges that control fast processes in industrial applications, e.g. load locks, should immediately react to pressure changes. To study the response time of vacuum gauges to rapid pressure changes, a dynamic vacuum standard was developed where the pressure may change from 100 kPa to 100 Pa within 20 ms in a step-wise manner or within longer times up to 1 s in a predictable manner. This is accomplished by a very fast opening gate valve DN40 and exchangeable orifices and ducts through which the mass flow rate can be calculated by gas flow simulation software. A simple physical model can be used to approximate the calculations. Experiments have been performed with capacitance diaphragm gauges with improved electronics to give a read-out every 0.7 ms. Preliminary results indicate that their response time is at most 1.7 ms, but may be significantly less.

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